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Visualization of the three-dimensional distribution of the crystal defects of large single crystals of calcium fluoride has been demonstrated by white X-ray section topography using sheet-like X-rays (BL28B2 at SPring-8). An image of the three-dimensional distribution of the crystal defects was reconstructed by stacking section topographs, which expressed the images of cross sections of the sample. The section topographs were recorded using a CMOS flat-panel imager or a CCD detector combined with scintillator (Gd2O2S:Tb) and relay lens system. The section topographs were measured by repeating cycles of exposure and sample translation along the direction perpendicular to the top face of the sample. Using high-brilliance and high-energy white X-rays (∼60 keV) efficiently, visualization of the three-dimensional structure of subgrains of a sample of up to 60 mm in diameter was achieved. Furthermore, the three-dimensional distribution of the glide plane in the crystal was visualized by reconstructing the linear contrast of the glide plane.

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