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The absolute values of the structure factors of diamond are determined for nine low-order reflections by measuring the X-ray Pendellösung beats on the wavelength scale. Parallel-sided wafers of synthetic diamond single crystals are used for specimens. The deformation charge density and the Debye-Waller B factor are evaluated from the structure factors. The charge density of pile-up electrons is estimated to be 0.44(17) eÅ-3 at the midpoint between the nearest-neighbour atoms. The density is slightly smaller than that determined by the powder diffraction method. The obtained B factor, 0.142 (9) Å2, is in good agreement with that evaluated to date from neutron diffraction measurements.

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