Measurement results of a new X-ray beam position monitor based on a super-thin single-crystal CVD diamond are presented. The device, characterized at a synchrotron low-energy beamline (4 keV), demonstrates low X-ray absorption (<3%), time-stable operation, relative homogeneous response, and beam position and intensity monitoring with submicrometer resolution and 2 permil precision, respectively.

Diamond sensors have been developed and tested for operation with high-energy X-ray beams at the European XFEL.