The 3D X-ray standing wave (XSW) technique is a new method for characterization of the 3D atomic profiles of planar periodic nanostructures, like nanometre-sized gratings or pillar arrays. The laboratory 3D XSW analysis of TiN gratings with nanometre-sized pitches is demonstrated here.

Investigations of the diffraction gratings for the high-resolution XUV Raman spectrometer at FLASH via both ex situ and in situ metrology and ray tracing.

Online metrology of beamline specifications is important but often sacrificed for reasons of time constraints. A technique that permits a reliable metrology without interruption of the measurement workflow is presented.

The multiprobe nature of the grazing-emission X-ray fluorescence approach in contrast to the conventional grazing-incidence X-ray fluorescence or X-ray standing-wave technique is investigated. A semi-analytic solution taking into account both grazing-incidence and grazing-emission geometries is derived. This solution is used to study the anomalous Kossel effect.

DABAM, an open-source database of X-ray mirrors metrology to be used with ray-tracing and wave-propagation codes for simulating the effect of the surface errors on the performance of a synchrotron radiation beamline.

The surface figure of an X-ray mirror was corrected by differential deposition and measured by off-line metrology.

State-of-the-art ex situ metrology for characterizing the quality of ultraprecise reflective synchrotron optics is reported. Beside slope measuring deflecometry the current state of mirror coating technology for single layer and multilayer coatings for very long mirror substrates is discussed.

A method for the simultaneous measurement of a wavefront's phase and the projection hologram of an unknown sample is presented. This method relies on an updated form of the speckle tracking approximation, which is based on a second-order expansion of the Fresnsel integral.

The theoretical description and experimental implementation of a speckle-tracking-based instrument which permits the characterisation of X-ray pulse wavefronts.

The European XFEL requires long and ultraflat X-ray mirrors of high precision for the beam offset and distribution system in each beamline; it is foreseen to have at least one mirror with bending capabilities. Here, the calibration procedure before and after installation is described, with a focus on the differences, possible explanations and improvements.