Modular deposition chamber for in situ X-ray experiments during RF and DC magnetron sputtering

B. Krause, S. Darma, M. Kaufholz, H.-H. Gräfe, S. Ulrich, M. Mantilla, R. Weigel, S. Rembold and T. Baumbach

A description of a new sputtering system for in situ X-ray experiments during DC and RF magnetron sputtering is given. First experimental results on vanadium carbide are presented.

Keywords: in situ X-ray measurement; thin-film growth; sputter deposition; deposition chamber; texture; polycrystalline materials.

Read article Similar articles

Format		BIBTeX
		EndNote
		RefMan
		Refer
		Medline
		CIF
		SGML
		Text
		Plain Text

Format		BIBTeX
		EndNote
		RefMan
		Refer
		Medline
		CIF
		SGML
		Text
		Plain Text

Search IUCr Journals		doi		Advanced search
Author		volume	page