Three-dimensional diffraction mapping by tuning the X-ray energy

T. W. Cornelius, D. Carbone, V. L. R. Jacques, T. U. Schülli and T. H. Metzger

Three-dimensional reciprocal-space maps of a single SiGe island around the Si(004) Bragg peak are recorded using an energy-tuning technique with a microfocused X-ray beam with compound refractive lenses as focusing optics.

Keywords: X-ray diffraction; nanofocused and microfocused XRD; energy scan; three-dimensional reciprocal-space mapping.

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