Mo/Si multilayer-coated amplitude-division beam splitters for XUV radiation sources

R. Sobierajski, R. A. Loch, R. W. E. van de Kruijs, E. Louis, G. von Blanckenhagen, E. M. Gullikson, F. Siewert, A. Wawro and F. Bijkerk

Short-wavelength XUV beam splitters consisting of multilayer reflective and transmissive coatings on 3 × 3 mm and 10 × 10 mm SiN membranes have been developed and fully characterized.

Keywords: Mo/Si; multilayer; XUV; beam splitter; free-electron laser; amplitude division.

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