Analysis of stress gradients in physical vapour deposition multilayers by X-ray diffraction at fixed depth intervals

G. Fischer, U. Selvadurai, J. Nellesen, T. Sprute and W. Tillmann

The objective of this article is to develop and apply a model for the design and evaluation of X-ray diffraction experiments to measure phase-specific residual stress profiles in multilayer systems.

Keywords: residual stress measurement; depth dependency of residual stress; constant penetration depths; multilayer systems; Ti/TiAlN.

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