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Micro X-ray diffraction and mechanical modeling on low-energy (60 keV) light-ion (He)-implanted polycrystals have shown that the strain tensor has only three nonzero components, which depend on grain orientation.

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Residual strains in a stabilized zirconia layer are measured from the macroscale to the nanoscale using X-ray and electron diffraction. A detailed description of the experiments is given and results at three different scales are compared and discussed.
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