Imaging of strain and lattice orientation by quick scanning X-ray microscopy combined with three-dimensional reciprocal space mapping

A new quick continuous mapping technique that comes together with a software package (XSOCS) for automatic data analysis for strain and lattice orientation is presented as a novel type of scanning probe microscope.

Full-field X-ray diffraction microscopy using polymeric compound refractive lenses

In this paper, full-field lens-based microdiffraction imaging using X-rays is introduced as a fast technique for determining lattice strain and orientation on crystalline surfaces. With a total exposure time of less than a minute, lattice tilts down to 10⁻⁴° could be distinguished locally on a focused-ion-beam-milled silicon wafer over a surface area of 100 × 100 µm.