Journal of Applied Crystallography
Journal of Applied
Crystallography
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J. Appl. Cryst.
(2014).
47
,
613-618
https://doi.org/10.1107/S160057671400168X
Download PDF of article
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On the assessment by grazing-incidence small-angle X-ray scattering of replica quality in polymer gratings fabricated by nanoimprint lithography
M. Soccio
,
N. Alayo
,
I. Martín-Fabiani
,
D. R. Rueda
,
M. C. García-Gutiérrez
,
E. Rebollar
,
D. E. Martínez-Tong
,
F. Pérez-Murano
and
T. A. Ezquerra
It is shown using grazing-incidence small-angle X-ray scattering experiments that a series of NIL polymer gratings with different line quality present characteristic features that can be associated with the level of defects per line.
Keywords:
grazing-incidence small-angle X-ray scattering
;
polymer gratings
;
nanoimprint lithography
.
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