Journal of Synchrotron Radiation
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J. Synchrotron Rad.
(2014).
21
,
300-314
https://doi.org/10.1107/S1600577513032402
Download PDF of article
Download citation
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Issue contents
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Characterization, optimization and surface physics aspects of
in situ
plasma mirror cleaning
E. Pellegrin
,
I. Sics
,
J. Reyes-Herrera
,
C. Perez Sempere
,
J. J. Lopez Alcolea
,
M. Langlois
,
J. Fernandez Rodriguez
and
V. Carlino
Quantitative results from a systematic study on different low-pressure RF plasma cleaning processes of carbon contaminations are presented.
Keywords:
synchrotron optics
;
carbon contamination
;
low-pressure RF plasma
;
X-ray photoemission spectroscopy
;
optical emission spectroscopy
;
interference microscopy
.
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