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The method and software of extended convolutional multiple whole profile (eCMWP) line profile analysis is used to determine the substructure in different texture components in terms of dislocation densities, subgrain size and twin boundary densities in nanocrystalline Ni thin films with different fiber textures. The diffraction patterns are measured in a high-angular-resolution X-ray diffractometer with almost parallel beam geometry, where the specimens are stationarily oriented for the hkl peaks corresponding to the different texture components.
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