Journal of Synchrotron Radiation
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J. Synchrotron Rad.
(2011).
18
,
280-286
https://doi.org/10.1107/S0909049510051666
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Densification of sol–gel silica thin films induced by hard X-rays generated by synchrotron radiation
P. Innocenzi
,
L. Malfatti
,
T. Kidchob
,
S. Costacurta
,
P. Falcaro
,
B. Marmiroli
,
F. Cacho-Nerin
and
H. Amenitsch
The effects induced by exposure of sol–gel thin films to hard X-rays have been studied.
Keywords:
sol–gel
;
deep X-ray lithography
;
thin films
.
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