Interface characterization of B₄C-based multilayers by X-ray grazing-incidence reflectivity and diffuse scattering

In order to study the properties of key B₄C-based multilayers, X-ray grazing-incidence reflectivity and diffuse scattering were used to characterize multilayer structures synthetically, including information of the thickness, density, interfacial roughness, interdiffusion, surface state and correlation length.