A hard X-ray nanoprobe beamline for nanoscale microscopy

R. P. Winarski, M. V. Holt, V. Rose, P. Fuesz, D. Carbaugh, C. Benson, D. Shu, D. Kline, G. B. Stephenson, I. McNulty and J. Maser

The Hard X-ray Nanoprobe Beamline is a precision platform for scanning probe and full-field microscopy with 3-30 keV X-rays. A combination of high-stability X-ray optics and precision motion sensing and control enables detailed studies of the internal features of samples with resolutions approaching 30 nm.

Keywords: X-ray nanoprobe; X-ray microscopy; zone plate; X-ray fluorescence; nanodiffraction; nanotomography.

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