Journal of Synchrotron Radiation
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J. Synchrotron Rad.
(2012).
19
,
425-427
https://doi.org/10.1107/S0909049512005249
Download PDF of article
Download citation
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A unique approach to accurately measure thickness in thick multilayers
B. Shi
,
J. M. Hiller
,
Y. Liu
,
C. Liu
,
J. Qian
,
L. Gades
,
M. J. Wieczorek
,
A. T. Marander
,
J. Maser
and
L. Assoufid
A new method to improve the accuracy of the image processing for the fabrication of thick multilayer optics is described.
Keywords:
multilayer Laue lenses
;
focused ion beam
;
scanning electron microscope
;
image processing
;
stitching
.
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