Interference phenomena of synchrotron radiation in TEY spectra for silicon-on-insulator structure

The general matrix theory of the photoelectron/fluorescence excitation in anisotropic multilayer films at the total reflection condition of X-rays has been developed. The observed distortions in the total electron yield Si L_2,3 spectra measured using synchrotron radiation from a SiO₂/Si/SiO₂/c-Si sample at different glancing angles of incidence have been explained by the creation of waveguide modes in the middle Si layer.