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Three-dimensional reciprocal space mapping is found to be a powerful and crucial method for the analysis of diffuse scattering originating from stacking faults that are diffracting in a noncoplanar geometry. The technique could be used to confirm transmission electron microscopy visibility criteria and to distinguish the origins of diffuse scattering signals.

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An experimental methodology for obtaining a large set of structure factor moduli in thin films using laboratory X-ray equipment (Cu Kα radiation) has been developed. Using this methodology, the structure of a CuMnAs thin film has been solved and refined without prior knowledge of the film structure.
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