Journal of Synchrotron Radiation
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J. Synchrotron Rad.
(2011).
18
,
143-147
https://doi.org/10.1107/S0909049510044535
Download PDF of article
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Hard X-ray microbeam lithography using a Fresnel zone plate with a long focal length
S. Y. Lee
,
I. H. Cho
,
J. M. Kim
,
H. C. Kang
and
D. Y. Noh
The focused X-ray microbeam with Si-based Fresnel zone plate was successfully utilized to fabricate patterns with features as small as 100 nm on a photoresist.
Keywords:
hard X-ray focusing
;
Fresnel zone plate
;
X-ray lithography
.
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