Co nanocrystals in amorphous multilayers - a structure study

Periodic Co/SiO₂ multilayers deposited by magnetron sputtering were investigated by grazing-incidence small-angle X-ray scattering, X-ray diffraction and the time-of-flight elastic recoil detection analysis method. During the deposition, Co nanoparticles are created and order spontaneously, forming a three-dimensional periodic array.