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The performance of a diffractometer equipped with a rotating anode source, a single-reflection collimating multilayer optic which can collimate an X-ray beam in two mutually perpendicular planes and a parallel-plate collimator in front of the detector has been characterized in detail. Its capabilities have been illustrated by ray-tracing calculations for the multilayer optic and by standard powder diffraction experiments.

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Pitfalls during non-ambient X-ray diffraction stress analysis of thin films (with nanosized grains) are discussed. Recipes for identifying nanosize-related effects on thermoelastic constants and various sources of residual stresses are provided.

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The depth gradients of grain interaction and stress in Cu thin films were determined by X-ray diffraction stress measurements at fixed penetration depths. The effects of the surface roughness and the refraction of the incident beam were illustrated on the basis of a comparison of synchrotron and laboratory measurements, utilizing the corresponding variation in wavelength for tuning the absorption.
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