Modeling of kinematic diffraction from a thin silicon film illuminated by a coherent, focused X-ray nanobeam

A. Ying, B. Osting, I. C. Noyan, C. E. Murray, M. Holt and J. Maser

Simulation of kinematic diffraction from a thin Si film illuminated by a coherent, focused X-ray nanobeam is presented and compared with experimental data measured at the nanoprobe instrument at Sector 26 of the Advanced Photon Source.

Keywords: nanodiffraction; kinematic diffraction; thin films; Fresnel zone plates; coherent focused X-rays; X-ray modeling; focusing optics.

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