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A waveguide microdiffraction setup is described for an undulator beamline at the European Synchrotron Radiation Facility. The composite optics consists of a waveguide, which confines the beam vertically, and a horizontally focusing multilayer mirror. A beam size of about 0.1 × 3 µm (vertical × horizontal) at λ = 0.095 nm has been obtained. The sample stage comprises a three-axis gantry with micrometre precision and a three-axis piezo-scanner with about 0.1 µm repeatability. Diffraction experiments are demonstrated for selected inorganic and polymeric samples. Possibilities for scanning diffractometry and small-angle scattering experiments are discussed.

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