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Optical microscopic and goniometric measurements were combined with microradiography, diffraction-pattern analysis and topography to study a 2 mm thick [001]-texture CVD (chemical vapour deposition) diamond film that had developed a coarse-grained structure composed of separate columnar crystallites. Individual columns were capped by large (001) facets, with widths up to 0.5 mm, and which were smooth but not flat, whereas the column sides were morphologically irregular. The refractive deviation of X-rays transmitted through the crystallites was exploited for delineating facet edges, thereby facilitating the controlled positioning of small-cross-section X-ray beams used for recording diffraction patterns from selected volumes in two representative crystallites. Their structure consisted of a [001]-axial core column surrounded by columns in twin orientation with respect to the core. The diamond volume directly below the (001) facets was free from low-angle boundaries, and no dislocation outcrops on the facets were detected. Significant elastic deformation of this volume was only present close to the facet periphery, where misorientations reached a few milliradians. Lattice imperfection was high in the twins, with ∼1° misorientations.

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