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A new grazing-incidence diffraction (GID) measurement geometry between in plane and out of plane is proposed. It is improved from the previous ω–φ compensated GID in side-inclination mode for measurement of residual stress in polycrystalline thin films [Wang & van Riessen (2017). Powder Diffr. 32, S9–S15]. Instead of keeping a constant azimuthal direction of the incident beam on the thin film sample, the current proposed variation maintains a constant azimuthal direction of the scattering vector projection on the thin film sample. The variation is named `ω–φ′ compensated GID in side-inclination mode' and enables d-spacing measurements along the same azimuthal direction. An Excel spreadsheet is included for readers to plan the measurement and to calculate the residual stress for the planned sample azimuthal direction. Anisotropic residual stresses of a polycrystalline NiFe thin film on an Si 001 substrate are measured by combining this method with phi rotations. Highly automated data analysis templates are developed using DIFFRAC.TOPAS v7 launch mode to calculate residual stress for all planned azimuthal directions sequentially. A pole figure file in simple text format is also generated from the same data set using DIFFRAC.TOPAS v7 launch mode, and can be directly imported into DIFFRAC.TEXTURE v4.1 for further texture analysis. Corrections for the incident-beam refraction have been implemented in both data analysis models.

Supporting information

zip

Zip compressed file https://doi.org/10.1107/S1600576721008335/te5081sup1.zip
Measured raw data using the proposed geometry.

txt

Text file https://doi.org/10.1107/S1600576721008335/te5081sup2.txt
Measurement script file with equations (1), (3), (4) implemented to load in START JOBS of Bruker Diffrac.Measurement Centre

xlsx

Microsoft Excel (XLSX) file https://doi.org/10.1107/S1600576721008335/te5081sup3.xlsx
Supplementary spreadsheet

pdf

Portable Document Format (PDF) file https://doi.org/10.1107/S1600576721008335/te5081sup4.pdf
Appendices F and G


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