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The multilayer Laue lens (MLL) is essentially a linear zone plate with large aspect ratio, which can theoretically focus hard X-rays to well below 1 nm with high efficiency when ideal structures are used. However, the focusing performance of a MLL depends heavily on the quality of the layers, especially the layer placement error which always exists in real MLLs. Here, a dynamical modeling approach, based on the coupled wave theory, is proposed to study the focusing performance of a MLL with layer placement error. The result of simulation shows that this method can be applied to various forms of layer placement error.

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