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Nondestructive nanostructural analysis is indispensable in the development of nanomaterials and nanofabrication processes for use in nanotechnology applications. This paper demonstrates a quantitative, nondestructive analysis of nanostructured thin films supported on substrates and their templated nanopores by using grazing incidence X-ray scattering and data analysis with a derived scattering theory. The analysis disclosed that vertically oriented nanodomain cylinders had formed in 20-100 nm thick films supported on substrates, which consisted of a mixture of poly(styrene-b-methyl methacrylate) (PS-b-PMMA) and PMMA homopolymer, and that the PMMA nanodomain cylinders were selectively etched out by ultraviolet light exposure and a subsequent rinse with acetic acid, resulting in a well ordered nanostructure consisting of hexagonally packed cylindrical nanopores.

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