Interference phenomena of synchrotron radiation in TEY spectra for silicon-on-insulator structure

The general matrix theory of the photoelectron/fluorescence excitation in anisotropic multilayer films at the total reflection condition of X-rays has been developed. In a particular case the theory has been applied to explain the oscillation structure of L_2,3 XANES spectra for a SiO₂/Si/SiO₂/c-Si sample in the pre-edge region which has been observed by a sample current technique at glancing angles of synchrotron radiation. Remarkably the phase of the oscillations is reversed by a ∼2° angle variation. The observed spectral features are found to be a consequence of waveguide mode creation in the middle layer of strained Si, which changes the radiation field amplitude in the top SiO₂ layer. The fit of the data required the correction of the optical constants for Si and SiO₂ near the Si L_2,3-edges.