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A quantitative phase-analysis method is proposed to analyse by X-ray diffraction multiphased thin films obtained by diffusion. Intensity corrections taking into account the spatial distribution of the different phases, and computing of phase concentrations without standards are presented. It is shown that important errors can be made if one does not take the nonhomogeneity of phase distributions into account. As an example, the quantitative phase analysis of a brass layer obtained by a diffusion process is given.

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