Buy article online - an online subscription or single-article purchase is required to access this article.
Download citation
Download citation
link to html
High-resolution X-ray diffraction is commonly used to measure the misfit strain and to determine the unstrained lattice parameter of epitaxic semiconductor layers assuming tetragonal distortion. In this paper a method is developed which links the measured peak separations in X-ray rocking curves to the strain tensor without an assumption of a layer symmetry. For the system (Zn,Mn)Se on thick ZnSe buffer layers deposited by MBE (molecular beam epitaxy) on GaAs substrate, the six components of the reciprocal metric tensor of each layer were determined by a least-squares algorithm from a set of 12 different reciprocal-lattice vectors. A principal-axis transformation of the calculated strain tensor of the (Zn,Mn)Se layer shows that the deformation in the interface plane nearly parallel to the [110] and [110] directions differs by more than 15%. The different critical thicknesses for the relaxation in these two directions are determined to be 36 and 87 nm, respectively. The deviation from tetragonal symmetry is a function of the epilayer thickness and reaches a maximum at about 200 nm.

Subscribe to Journal of Applied Crystallography

The full text of this article is available to subscribers to the journal.

If you have already registered and are using a computer listed in your registration details, please email support@iucr.org for assistance.

Buy online

You may purchase this article in PDF and/or HTML formats. For purchasers in the European Community who do not have a VAT number, VAT will be added at the local rate. Payments to the IUCr are handled by WorldPay, who will accept payment by credit card in several currencies. To purchase the article, please complete the form below (fields marked * are required), and then click on `Continue'.
E-mail address* 
Repeat e-mail address* 
(for error checking) 

Format*   PDF (US $40)
In order for VAT to be shown for your country javascript needs to be enabled.

VAT number 
(non-UK EC countries only) 
Country* 
 

Terms and conditions of use
Contact us

Follow J. Appl. Cryst.
Sign up for e-alerts
Follow J. Appl. Cryst. on Twitter
Follow us on facebook
Sign up for RSS feeds