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Mass attenuation coefficients of seven elements between atomic numbers 22 and 30 were measured at 20 X-ray energies between 4.5 and 11 keV. These energies correspond to fluorescence radiation excited by monochromatic Mo radiation. The measurements were made on thin metal foils, which were spread flat and perpendicular to the beam scattered from the fluorescent sample. In this arrangement, the measured attenuation includes photoelectric absorption plus average elastic and inelastic scattering. The mass per unit area of a foil was determined by weighing and the impurity concentration by fluorescence analysis. The spectral lines corresponding to the components of the fluorescent radiation and those of the secondary radiation were resolved by the so-called singular value decomposition (SVD). The probable errors of the attenuation coefficients were typically 1%. The general agreement with previous experimental and theoretical values is good, but at low energies and at energies just above the absorption edges the present values are about 5% larger than theoretical values based on relativistic HFS (Hartree–Fock–Slater) calculations.

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