Buy article online - an online subscription or single-article purchase is required to access this article.
Download citation
Download citation
link to html
A feasibility study of an X-ray experiment is presented by which the lattice parameter of a silicon wafer relative to that of a perfect reference silicon crystal can be measured with a precision of 10-7. A multicrystal geometry in the symmetric Bragg case is proposed, using a monolithic monochromator as a beam splitter. Sample and analyser crystals are aligned with respect to the monochromator and the rotation of the analyser around its Bragg position produces two diffraction peaks. Their separation is related to the difference between the lattice parameters of monochromator and sample. The sample can be a piece of any commercial slice, generally cut from the ingot with an angle between the surface normal and the nominal crystallographic orientation and bent due to the mirror finishing on only one side. Moreover, the bending can be induced by layers grown on the surface by the processes of planar technology. Miscutting angle and curvature influence the diffraction peak position. The X-ray tracing and the procedure chosen for measurement eliminate these effects.

Subscribe to Journal of Applied Crystallography

The full text of this article is available to subscribers to the journal.

If you have already registered and are using a computer listed in your registration details, please email support@iucr.org for assistance.

Buy online

You may purchase this article in PDF and/or HTML formats. For purchasers in the European Community who do not have a VAT number, VAT will be added at the local rate. Payments to the IUCr are handled by WorldPay, who will accept payment by credit card in several currencies. To purchase the article, please complete the form below (fields marked * are required), and then click on `Continue'.
E-mail address* 
Repeat e-mail address* 
(for error checking) 

Format*   PDF (US $40)
In order for VAT to be shown for your country javascript needs to be enabled.

VAT number 
(non-UK EC countries only) 
Country* 
 

Terms and conditions of use
Contact us

Follow J. Appl. Cryst.
Sign up for e-alerts
Follow J. Appl. Cryst. on Twitter
Follow us on facebook
Sign up for RSS feeds