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Small-angle X-ray scattering has been used to study small precipitated particles in internally oxidized Cu-Be and Cu-Ti alloys. Particle-size measurements and integrated intensity values allow us to determine the effect of such fundamental parameters as oxidation temperature and oxygen pressure. The annealing behaviour of these alloys has also been studied. Results on Cu-Be have been found different from those on Cu-Ti. For the former alloy only oxygen pressure influences the oxide particle size, while for the latter alloy, both oxidation temperature and annealing play a role. The experimental integrated intensity is analysed and compared with the theoretical value, so that a statement about the nature of the oxide is possible.

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