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Equations describing the coherent and diffuse scattering in a crystal modulated by a surface acoustic wave (SAW) are derived using the dynamical X-ray diffraction theory. The effect of depth attenuation of the Rayleigh surface wave amplitude on the crystal rocking curve profiles is investigated. Results of the numerical simulation of the dynamical diffraction in a mosaic crystal modulated by a SAW, taking into account a block size distribution, are presented. It is shown that the diffuse scattering is distributed in the reciprocal space not only in the vicinity of the main diffraction peak but also about the satellite diffraction peaks, and this distribution depends on the size fluctuations of the crystal defects. Theoretical reciprocal space maps and rocking curves are compared with the corresponding experimental results.

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