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The microwave dielectric CaZrO3 has been prepared in nanocrystalline form by high-energy ball milling an equimolar powder mixture of CaO and monoclinic (m) ZrO2. The formation of CaZrO3 is noticed in the X-ray diffraction pattern of 2 h ball-milled powder. At the early stage of milling, up to 4 h, the weight fraction of CaZrO3 increases rapidly and then slowly reaches almost the saturation value of ∼73 wt% within 18 h of milling. It is observed that in the course of milling, the weight fraction of c-ZrO2 increases continuously from its starting value, ∼2.5 wt%, to ∼43 wt% within 2 h of milling, and then reduces slowly to its starting value. It seems that the c-ZrO2 phase has been stabilized by CaO and takes part in the formation of CaZrO3 by mechanochemical reaction of nanocrystalline CaO and c-ZrO2 crystallites. However, post-annealing of 2, 6 and 18 h ball-milled samples results in the formation of ∼95 wt% CaZrO3 phase. The formation mechanism, phase transition kinetics, structure and microstructure changes in terms of lattice imperfections and relative phase abundances of individual phases have been estimated from the analysis of X-ray powder diffraction data of unmilled, ball-milled and post-annealed samples by Rietveld powder structure refinement.

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