Journal of Synchrotron Radiation

Volume 14, Part 1 (January 2007)

research papers

J. Synchrotron Rad. (2007). 14, 163-168 [ doi:10.1107/S0909049506045304 ]

An off-axis magnetron-sputtering system for in situ studies of artificial superlattices growth by synchrotron radiation scattering

Y.-C. Liang, H.-Y. Lee, H.-J. Liu, Y.-W. Hsieh and Y.-C. Liang

Abstract: A sputtering chamber for the growth of artificial superlattices of oxide-based materials is described. The chamber is designed to fit into a standard Huber eight-circle diffractometer. The chamber serves for investigation with synchrotron radiation of growth characteristics of oxide-based artificial superlattices in situ. Two Be windows of large area in the vacuum chamber enable measurement of reflections of X-rays at entrance and exit angles up to 50°. Large perpendicular momentum transfers are practical with this apparatus. The possibility of investigating X-ray scattering in situ is demonstrated by observation of the effects of the modulation length and the stacking period on the growth characteristics of BaTiO₃/LaNiO₃ artificial superlattices.

Keywords: X-ray diffraction; X-ray reflectivity; artificial superlattices; RF sputtering.