Journal of Applied Crystallography

Volume 31, Part 4 (August 1998)

research papers

J. Appl. Cryst. (1998). 31, 589-593 [ doi:10.1107/S0021889898001071 ]

X-ray Fine Structure Investigation of Germanium Nanoclusters

J. Bläsing, P. Kohlert, M. Zacharias and P. Veit

Abstract: Germanium nanostructures embedded in amorphous SiO_x matrices were investigated by different X-ray techniques. We report either randomly distributed or layer-organized arrangements of the nanoclusters or nanocrystals, depending on the sputtering conditions. Recrystallization was found to occur by annealing the films near the melting point of germanium.