Journal of Applied Crystallography

Volume 40, Part 5 (October 2007)


research papers



J. Appl. Cryst. (2007). 40, 813-819    [ doi:10.1107/S0021889807030403 ]

Data reduction practice in X-ray reflectometry

F. Salah, B. Harzallah and A. van der Lee

Abstract: Data reduction practice in X-ray reflectometry is described. The several approaches for applying certain corrections, such as background subtraction, geometrical effects and normalization, are compared and discussed. Two widely employed setups, one with beam knife-edge and one without, are compared with respect to a number of corrections to be applied.

Keywords: data reduction; X-ray reflectometry; background subtraction; thin films; multilayers.

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