J. Appl. Cryst. (2003). 36, 940-943 [ doi:10.1107/S0021889803002875 ]
Abstract: A computer program which calculates inner-shell ionization and backscattering cross sections for fast electrons incident on a crystal is presented. The program calculates the inelastic scattering coefficients for inner-shell ionization, pertinent to electron energy loss spectroscopy and energy dispersive X-ray analysis, using recently presented parameterizations of the atomic scattering factors. Orientation-dependent cross sections, suitable for atom location by channelling enhanced microanalysis, may be calculated. Inelastic scattering coefficients that allow the calculation of orientation-dependent annular dark-field and Rutherford backscattering maps are calculated using an Einstein model. In all cases, absorption due to thermal diffuse scattering, also calculated using an Einstein model, can be included.
Keywords: inelastic scattering; electron energy loss spectroscopy; energy dispersive X-ray analysis; channelling enhanced microanalysis.
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